"Characterization of cyclic delamination behavior of thin film multilayers."

Thomas Walter et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.06.062

access: closed

type: Journal Article

metadata version: 2022-04-01

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Thomas Walter, Golta Khatibi, Michael Nelhiebel, M. Stefenelli:
Characterization of cyclic delamination behavior of thin film multilayers. Microelectron. Reliab. 88-90: 721-725 (2018)

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