"Semiconductor material analysis based on microcalorimeter EDS."

B. Simmnacher et al. (2003)

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DOI: 10.1016/S0026-2714(03)00304-4

access: closed

type: Journal Article

metadata version: 2020-02-22

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B. Simmnacher, R. Weiland, J. Höhne, F. v. Feilitzsch, C. Hollerith:
Semiconductor material analysis based on microcalorimeter EDS. Microelectron. Reliab. 43(9-11): 1675-1680 (2003)

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