"Improved estimation of the resistivity of pure copper and electrical ..."

Constance E. Schuster, Mark G. Vangel, Harry A. Schafft (2001)

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DOI: 10.1016/S0026-2714(00)00227-4

access: closed

type: Journal Article

metadata version: 2020-02-22

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Constance E. Schuster, Mark G. Vangel, Harry A. Schafft:
Improved estimation of the resistivity of pure copper and electrical determination of thin copper film dimensions. Microelectron. Reliab. 41(2): 239-252 (2001)

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