"Quantitative oxide charge determination by photocurrent analysis."

Mathias Rommel, Anton J. Bauer, Heiner Ryssel (2007)

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DOI: 10.1016/J.MICROREL.2007.01.069

access: closed

type: Journal Article

metadata version: 2020-02-22

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Mathias Rommel, Anton J. Bauer, Heiner Ryssel:
Quantitative oxide charge determination by photocurrent analysis. Microelectron. Reliab. 47(4-5): 673-677 (2007)

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