"A fast reliability assessment method for Si MEMS based microcantilever beams."

Peyman Rafiee, Golta Khatibi (2014)

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DOI: 10.1016/J.MICROREL.2014.07.107

access: closed

type: Journal Article

metadata version: 2020-02-22

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Peyman Rafiee, Golta Khatibi:
A fast reliability assessment method for Si MEMS based microcantilever beams. Microelectron. Reliab. 54(9-10): 2180-2184 (2014)

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