"Reliability of polycrystalline silicon thin film resistors."

M. Nakabayashi et al. (2001)

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DOI: 10.1016/S0026-2714(01)00214-1

access: closed

type: Journal Article

metadata version: 2020-02-22

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  - https://dblp.org/rec/journals/mr/NakabayashiOSICKYM01
M. Nakabayashi, Hidenori Ohyama, Eddy Simoen, M. Ikegami, Cor Claeys, K. Kobayashi, M. Yoneoka, K. Miyahara:
Reliability of polycrystalline silicon thin film resistors. Microelectron. Reliab. 41(9-10): 1341-1346 (2001)

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