"Characterisation of dopants distribution using electron holography and ..."

U. Muehle et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.043

access: closed

type: Journal Article

metadata version: 2020-02-22

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U. Muehle, A. Lenk, R. Weiland, H. Lichte:
Characterisation of dopants distribution using electron holography and FIB-based lift-off preparation. Microelectron. Reliab. 45(9-11): 1558-1561 (2005)

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