"Failure predictive model of capacitive RF-MEMS."

S. Mellé et al. (2005)

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DOI: 10.1016/J.MICROREL.2005.07.092

access: closed

type: Journal Article

metadata version: 2020-02-22

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S. Mellé, D. De Conto, L. Mazenq, David Dubuc, B. Poussard, C. Bordas, Katja Grenier, Laurent Bary, Olivier Vendier, J. L. Muraro:
Failure predictive model of capacitive RF-MEMS. Microelectron. Reliab. 45(9-11): 1770-1775 (2005)

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