"MIM capacitor-related early-stage field failures."

Jia Lu et al. (2012)

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DOI: 10.1016/J.MICROREL.2012.06.049

access: closed

type: Journal Article

metadata version: 2023-03-21

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Jia Lu, BoCheng Cao, WenShe Wu, YuFeng Dai, ChuangJun Huang, Giovanna Mura:
MIM capacitor-related early-stage field failures. Microelectron. Reliab. 52(9-10): 2073-2076 (2012)

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