"Effect of lanthanum silicate interface layer on the electrical ..."

Yiming Lei et al. (2018)

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DOI: 10.1016/J.MICROREL.2018.03.037

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type: Journal Article

metadata version: 2020-02-22

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Yiming Lei, Hitoshi Wakabayashi, Kazuo Tsutsui, Hiroshi Iwai, Masayuki Furuhashi, Shingo Tomohisa, Satoshi Yamakawa, Kuniyuki Kakushima:
Effect of lanthanum silicate interface layer on the electrical characteristics of 4H-SiC metal-oxide-semiconductor capacitors. Microelectron. Reliab. 84: 248-252 (2018)

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