"Degradation behavior in upstream/downstream via test structures."

Jörg Kludt et al. (2014)

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DOI: 10.1016/J.MICROREL.2014.07.042

access: closed

type: Journal Article

metadata version: 2020-02-22

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Jörg Kludt, Kirsten Weide-Zaage, Markus Ackermann, Verena Hein, Christian Kovács:
Degradation behavior in upstream/downstream via test structures. Microelectron. Reliab. 54(9-10): 1724-1728 (2014)

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