"On the applicability of MIL-Spec-based helium fine leak test to packages ..."

Arindam Goswami, Bongtae Han (2008)

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DOI: 10.1016/J.MICROREL.2008.07.067

access: closed

type: Journal Article

metadata version: 2020-02-22

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Arindam Goswami, Bongtae Han:
On the applicability of MIL-Spec-based helium fine leak test to packages with sub-micro liter cavity volumes. Microelectron. Reliab. 48(11-12): 1815-1821 (2008)

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