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"Micro-mechanical testing of SiLK by nanoindentation and substrate ..."
Viktor Gonda et al. (2007)
- Viktor Gonda
, Kaspar M. B. Jansen, Leo J. Ernst, Jaap M. J. den Toonder
, G. Q. Zhang:
Micro-mechanical testing of SiLK by nanoindentation and substrate curvature techniques. Microelectron. Reliab. 47(2-3): 248-251 (2007)
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