"Application of various optical techniques for ESD defect localization."

Fabien Essely et al. (2006)

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DOI: 10.1016/J.MICROREL.2006.07.021

access: closed

type: Journal Article

metadata version: 2020-02-22

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Fabien Essely, Frédéric Darracq, Vincent Pouget, Mustapha Remmach, Felix Beaudoin, Nicolas Guitard, Marise Bafleur, Philippe Perdu, André Touboul, Dean Lewis:
Application of various optical techniques for ESD defect localization. Microelectron. Reliab. 46(9-11): 1563-1568 (2006)

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