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"Simulation of time depending void formation in copper, aluminum and ..."

David Dalleau, Kirsten Weide-Zaage, Yves Danto (2003)

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DOI: 10.1016/S0026-2714(03)00310-X

access: closed

type: Journal Article

metadata version: 2020-02-22

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David Dalleau, Kirsten Weide-Zaage, Yves Danto:
Simulation of time depending void formation in copper, aluminum and tungsten plugged via structures. Microelectron. Reliab. 43(9-11): 1821-1826 (2003)

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