"Characteristics of the intrinsic defects in unintentionally doped 4H-SiC ..."

Ping Cheng, Yuming Zhang, Yimen Zhang (2011)

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DOI: 10.1016/J.MICROREL.2010.09.003

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ping Cheng, Yuming Zhang, Yimen Zhang:
Characteristics of the intrinsic defects in unintentionally doped 4H-SiC after thermal annealing. Microelectron. Reliab. 51(3): 572-575 (2011)

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