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"Reliability of ultra thin ZrO₂ films on strained-Si."

M. K. Bera, Chinmay K. Maiti (2008)

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DOI: 10.1016/J.MICROREL.2008.01.001

access: closed

type: Journal Article

metadata version: 2022-08-23

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M. K. Bera, Chinmay K. Maiti:
Reliability of ultra thin ZrO₂ films on strained-Si. Microelectron. Reliab. 48(5): 682-692 (2008)

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