"Temperature stability of a piezoresistive MEMS resonator including ..."

S. Bendida et al. (2008)

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DOI: 10.1016/J.MICROREL.2008.06.049

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type: Journal Article

metadata version: 2022-05-18

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S. Bendida, J. J. Koning, J. J. M. Bontemps, J. T. M. van Beek, D. Wu, Marcel A. J. van Gils, S. Nath:
Temperature stability of a piezoresistive MEMS resonator including self-heating. Microelectron. Reliab. 48(8-9): 1227-1231 (2008)

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