"Reliability of ultrathin nitrided oxides grown in low pressure ..."

Matthias Beichele, Anton J. Bauer, Heiner Ryssel (2001)

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DOI: 10.1016/S0026-2714(01)00071-3

access: closed

type: Journal Article

metadata version: 2020-02-22

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Matthias Beichele, Anton J. Bauer, Heiner Ryssel:
Reliability of ultrathin nitrided oxides grown in low pressure N₂O ambient. Microelectron. Reliab. 41(7): 1089-1092 (2001)

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