"Methodology to determine the impact of linewidth variation on chip scale ..."

Muhammad Bashir et al. (2010)

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DOI: 10.1016/J.MICROREL.2010.07.091

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type: Journal Article

metadata version: 2022-10-02

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Muhammad Bashir, Linda S. Milor, Dae Hyun Kim, Sung Kyu Lim:
Methodology to determine the impact of linewidth variation on chip scale copper/low-k backend dielectric breakdown. Microelectron. Reliab. 50(9-11): 1341-1346 (2010)

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