"Fabrication of advanced probes for atomic force microscopy using focused ..."

O. A. Ageev et al. (2015)

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DOI: 10.1016/J.MICROREL.2015.06.079

access: closed

type: Journal Article

metadata version: 2020-02-22

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O. A. Ageev, Alexey S. Kolomiytsev, A. V. Bykov, V. A. Smirnov, I. N. Kots:
Fabrication of advanced probes for atomic force microscopy using focused ion beam. Microelectron. Reliab. 55(9-10): 2131-2134 (2015)

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