"Nanosculpture: Three-dimensional CMOS device structures for the ULSI era."

Byung-Gook Park et al. (2009)

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DOI: 10.1016/J.MEJO.2008.11.011

access: closed

type: Journal Article

metadata version: 2020-02-22

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Byung-Gook Park, Jae Young Song, Jong Pil Kim, Hoon Jeong, Jung Hoon Lee, Seongjae Cho:
Nanosculpture: Three-dimensional CMOS device structures for the ULSI era. Microelectron. J. 40(4-5): 769-772 (2009)

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