"Modeling and simulation development of electron beam resist based on ..."

Ling Li et al. (2006)

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DOI: 10.1016/J.MEJO.2005.05.028

access: closed

type: Journal Article

metadata version: 2020-02-22

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Ling Li, Shibing Long, Congshun Wang, Wengang Wu, Yilong Hao, Ming Liu:
Modeling and simulation development of electron beam resist based on cellular automata. Microelectron. J. 37(4): 317-320 (2006)

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