"Design and fabrication of silicon-based 8×8 MEMS optical switch array."

Cuiping Jia et al. (2009)

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DOI: 10.1016/J.MEJO.2008.06.047

access: closed

type: Journal Article

metadata version: 2020-02-22

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Cuiping Jia, Jingran Zhou, Wei Dong, Weiyou Chen:
Design and fabrication of silicon-based 8×8 MEMS optical switch array. Microelectron. J. 40(1): 83-86 (2009)

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