"Investigation of ZnO nanopillars fabrication in a new Thomas Swan close ..."

Arne Behrends, Andrey Bakin, Andreas Waag (2009)

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DOI: 10.1016/J.MEJO.2008.07.026

access: closed

type: Journal Article

metadata version: 2023-03-21

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Arne Behrends, Andrey Bakin, Andreas Waag:
Investigation of ZnO nanopillars fabrication in a new Thomas Swan close coupled showerhead MOCVD reactor. Microelectron. J. 40(2): 280-282 (2009)

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