"Fault Detection in the Semiconductor Etch Process Using the Seasonal ..."

Muhammad Zeeshan Arshad, Javeria Muhammad Nawaz, Sang Jeen Hong (2014)

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DOI: 10.3745/JIPS.04.0004

access: open

type: Journal Article

metadata version: 2021-02-16

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Muhammad Zeeshan Arshad, Javeria Muhammad Nawaz, Sang Jeen Hong:
Fault Detection in the Semiconductor Etch Process Using the Seasonal Autoregressive Integrated Moving Average Modeling. J. Inf. Process. Syst. 10(3): 429-442 (2014)

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