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"Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency ..."
Ahmed Awad et al. (2017)
- Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama:
Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement. IPSJ Trans. Syst. LSI Des. Methodol. 10: 28-38 (2017)
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