"High temperature MCP process suitable for extremely hard high functional ..."

Nobuo Yasunaga, Yukiharu Yamamoto (2006)

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DOI: 10.1504/IJMTM.2006.009994

access: closed

type: Journal Article

metadata version: 2020-06-04

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Nobuo Yasunaga, Yukiharu Yamamoto:
High temperature MCP process suitable for extremely hard high functional SiC wafers. Int. J. Manuf. Technol. Manag. 9(1/2): 172-182 (2006)

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