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"Hybrid bulk micro-machining process suitable for roughness reduction in ..."
Arvind Chandrasekaran et al. (2006)
- Arvind Chandrasekaran, Muthukumaran Packirisamy, Ion Stiharu, Andre Delage:
Hybrid bulk micro-machining process suitable for roughness reduction in optical MEMS devices. Int. J. Manuf. Technol. Manag. 9(1/2): 144-159 (2006)
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