"A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical ..."

Dongil Cho et al. (2003)

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DOI: 10.1142/S1465876303001599

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijces/ChoKKPKSCB03
Dongil Cho, Hyoungho Ko, Jongpal Kim, Sangjun Park, Donghun Kwak, Taeyong Song, William Carr, James Bus:
A Novel Z-Axis Accelerometer With Perfectly-Aligned, Fully-Offset Vertical Combs Fabricated Using The Extended Sacrificial Bulk Micromachining Process. Int. J. Comput. Eng. Sci. 4(3): 493-496 (2003)

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