"Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano ..."

Dong-Il Cho et al. (2003)

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DOI: 10.1142/S1465876303000879

access: closed

type: Journal Article

metadata version: 2020-07-09

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  - https://dblp.org/rec/journals/ijces/ChoCLPPPPKJ03
Dong-Il Cho, Byoung-Doo Choi, Sangwoo Lee, Seung Joon Paik, Sangjun Park, Jaehong Park, Yonghwa Park, Jongpal Kim, Il-Woo Jung:
Dry And Wet Etching With (111) Silicon For High-Performance Micro And Nano Systems. Int. J. Comput. Eng. Sci. 4(2): 181-187 (2003)

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