"Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its ..."

Michio Uneda et al. (2021)

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DOI: 10.20965/IJAT.2021.P0878

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type: Journal Article

metadata version: 2023-09-30

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Michio Uneda, Naoki Takahashi, Takashi Fujita, Yutaro Arai:
Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC. Int. J. Autom. Technol. 15(6): 878-884 (2021)

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