"Early history of X-ray lithography at IBM."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Eberhard Spiller (1993)

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DOI: 10.1147/RD.373.0291

access: closed

type: Journal Article

metadata version: 2020-03-13

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Eberhard Spiller:
Early history of X-ray lithography at IBM. IBM J. Res. Dev. 37(3): 291-298 (1993)

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