"X-ray lithography beamlines in the IBM Advanced Lithography Facility."

Name: dblp XML data dump
Creator: Schloss Dagstuhl - Leibniz Center for Informatics
Published: 1993
License: https://creativecommons.org/publicdomain/zero/1.0/
Keywords: dblp, XML, computer science, scholarly publications, metadata

Jerome P. Silverman, Robert P. Rippstein, James M. Oberschmidt (1993)

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DOI: 10.1147/RD.373.0395

access: closed

type: Journal Article

metadata version: 2020-03-13

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Jerome P. Silverman, Robert P. Rippstein, James M. Oberschmidt:
X-ray lithography beamlines in the IBM Advanced Lithography Facility. IBM J. Res. Dev. 37(3): 395-410 (1993)

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