"Application of electron and ion beam analysis techniques to microelectronics."

Tung-Sheng Kuan et al. (1992)

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DOI: 10.1147/RD.362.0183

access: closed

type: Journal Article

metadata version: 2020-03-13

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Tung-Sheng Kuan, Philip E. Batson, Randall M. Feenstra, Alan J. Slavin, Ruud M. Tromp:
Application of electron and ion beam analysis techniques to microelectronics. IBM J. Res. Dev. 36(2): 183-207 (1992)

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