"Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, ..."

Greg Yeric et al. (2005)

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DOI: 10.1109/MDT.2005.63

access: closed

type: Journal Article

metadata version: 2020-05-17

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  - https://dblp.org/rec/journals/dt/YericCGDSG05
Greg Yeric, Ethan Cohen, John Garcia, Kurt Davis, Esam Salem, Gary Green:
Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, and DFM Characterization at 65 nm and Below. IEEE Des. Test Comput. 22(3): 232-239 (2005)

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