"Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks."

Haoyu Yang et al. (2022)

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DOI: 10.48550/ARXIV.2203.08616

access: open

type: Informal or Other Publication

metadata version: 2024-08-04

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Haoyu Yang, Zongyi Li, Kumara Sastry, Saumyadip Mukhopadhyay, Mark Kilgard, Anima Anandkumar, Brucek Khailany, Vivek Singh, Haoxing Ren:
Generic Lithography Modeling with Dual-band Optics-Inspired Neural Networks. CoRR abs/2203.08616 (2022)

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