"Creation and Fixing of Lithography Hotspots with Synopsys Tools."

I-Lun Tseng et al. (2018)

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DOI: —

access: open

type: Informal or Other Publication

metadata version: 2022-08-23

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  - electronic edition @ arxiv.org (open access)
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  dblp key:
  - journals/corr/abs-1808-05998
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  persistent URL:
  - https://dblp.org/rec/journals/corr/abs-1808-05998
I-Lun Tseng, Valerio Perez, Yongfu Li, Zhao Chuan Lee, Vikas Tripathi, Yoong Seang Jonathan Ong:
Creation and Fixing of Lithography Hotspots with Synopsys Tools. CoRR abs/1808.05998 (2018)

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