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"Identifying Position-Dependent Mechanical Systems: A Modal Approach with ..."
Robbert Voorhoeve et al. (2018)
- Robbert Voorhoeve, Robin de Rozario, Wouter H. T. M. Aangenent, Tom Oomen:
Identifying Position-Dependent Mechanical Systems: A Modal Approach with Applications to Wafer Stage Control. CoRR abs/1807.06942 (2018)
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