"Determining an appropriate number of FOUPs in semiconductor wafer ..."

Jens Zimmermann et al. (2008)

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DOI: 10.1109/WSC.2008.4736315

access: closed

type: Conference or Workshop Paper

metadata version: 2023-06-26

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Jens Zimmermann, Scott J. Mason, John W. Fowler, Lars Mönch:
Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities. WSC 2008: 2164-2170

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