"A framework for standard modular simulation in semiconductor wafer ..."

José A. Ramírez-Hernández et al. (2005)

> Home

Details and statistics

DOI: 10.1109/WSC.2005.1574502

access: closed

type: Conference or Workshop Paper

metadata version: 2021-06-10

- view
  authority control:
- export record
  dblp key:
  - conf/wsc/Ramirez-HernandezLFML05
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/wsc/Ramirez-HernandezLFML05
José A. Ramírez-Hernández, Heshan Li, Emmanuel Fernandez, Charles R. McLean, Swee Leong:
A framework for standard modular simulation in semiconductor wafer fabrication systems. WSC 2005: 2162-2171

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.