"Understanding the impact of equipment and process changes with a ..."

Jeffrey W. Herrmann et al. (2000)

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DOI: 10.1109/WSC.2000.899130

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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Jeffrey W. Herrmann, Brian F. Conaghan, Laurent Henn-Lecordier, Praveen Mellacheruvu, Manh-Quan Nguyen, Gary W. Rubloff, Rock Z. Shi:
Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environment. WSC 2000: 1491-1498

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