"3D microelectronic with BEOL compatible devices."

Dominique Drouin et al. (2015)

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DOI: 10.1109/VTS.2015.7116262

access: closed

type: Conference or Workshop Paper

metadata version: 2023-03-24

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  - https://dblp.org/rec/conf/vts/DrouinADLPSE15
Dominique Drouin, Mohamed Amine-Bounouar, Gabriel Droulers, M. Labalette, Michel Pioro-Ladriere, A. Souifi, Serge Ecoffey:
3D microelectronic with BEOL compatible devices. VTS 2015: 1

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