"Enabling Active Backside Technology for ESD and LU Reliability in DTCO/STCO."

Kateryna Serbulova et al. (2022)

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DOI: 10.1109/VLSITECHNOLOGYANDCIR46769.2022.9830146

access: closed

type: Conference or Workshop Paper

metadata version: 2024-10-06

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Kateryna Serbulova, S.-H. Chen, Geert Hellings, Anabela Veloso, Anne Jourdain, Dimitri Linten, Jo De Boeck, Guido Groeseneken, Julien Ryckaert, Geert Van der Plas, Eric Beyne, Eugenio Dentoni Litta, Naoto Horiguchi:
Enabling Active Backside Technology for ESD and LU Reliability in DTCO/STCO. VLSI Technology and Circuits 2022: 431-432

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