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"A 184nW, 121µg/√Hz Noise Floor Triaxial MEMS Accelerometer ..."
Yimai Peng et al. (2022)
- Yimai Peng
, Seokhyeon Jeong, Kyojin Choo, Yejoong Kim, Li-Yu Chen, Rohit Rothe, Li Xu, Ilya Gurin, Omid Oliaei, Vadim Tsinker, Stephen Bart, Peter Hartwell, David T. Blaauw, Dennis Sylvester:
A 184nW, 121µg/√Hz Noise Floor Triaxial MEMS Accelerometer with Integrated CMOS Readout Circuit and Variation-Compensated High Voltage MEMS Biasing. VLSI Technology and Circuits 2022: 84-85
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