"Multi-Scale Active Vibration Suppression Technology for Nanometer-Order ..."

Jun Etoh, Hironori Ogawa, Hiroki Takahashi (2024)

> Home

Details and statistics

DOI: 10.1109/SII58957.2024.10417535

access: closed

type: Conference or Workshop Paper

metadata version: 2024-02-20

- view
  - electronic edition via DOI
  - unpaywalled version
  authority control:
- export record
  dblp key:
  - conf/sii/EtohOT24
- ask others
- share record
  persistent URL:
  - https://dblp.org/rec/conf/sii/EtohOT24
Jun Etoh, Hironori Ogawa, Hiroki Takahashi:
Multi-Scale Active Vibration Suppression Technology for Nanometer-Order System. SII 2024: 1543-1548

manage site settings

To protect your privacy, all features that rely on external API calls from your browser are turned off by default. You need to opt-in for them to become active. All settings here will be stored as cookies with your web browser. For more information see our F.A.Q.