"Dynamic force measurement for microassembly of surface MEMS structures."

Yantao Shen, Ning Xi, Wen J. Li (2005)

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DOI: 10.1109/ROBIO.2005.246344

access: closed

type: Conference or Workshop Paper

metadata version: 2020-11-27

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Yantao Shen, Ning Xi, Wen J. Li:
Dynamic force measurement for microassembly of surface MEMS structures. ROBIO 2005: 646-651

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