"Study on compatible CMOS-MEMS process with surface micromachining for the ..."

Danqi Zhao et al. (2014)

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DOI: 10.1109/NEMS.2014.6908861

access: closed

type: Conference or Workshop Paper

metadata version: 2021-09-09

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Danqi Zhao, Xian Huang, Jun He, Li Zhang, Peng Liu, Fang Yang, Dacheng Zhang:
Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration. NEMS 2014: 513-516

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