"Fabrication of Nanoslits with Etching TSWE Method."

Hao Hong et al. (2021)

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DOI: 10.1109/NEMS51815.2021.9451489

access: closed

type: Conference or Workshop Paper

metadata version: 2022-10-02

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Hao Hong, Li Ye, Ke Li, Pasqualina M. Sarro, Guoqi Zhang, Zewen Liu:
Fabrication of Nanoslits with Etching TSWE Method. NEMS 2021: 174-177

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