"A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes ..."

Taotao Guan et al. (2018)

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DOI: 10.1109/NEMS.2018.8556953

access: closed

type: Conference or Workshop Paper

metadata version: 2024-07-27

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Taotao Guan, Fang Yang, Wei Wang, Peng Liu, Zexin Fan, Leijian Cheng, Zikun Chen, Runze Yu, Qiancheng Zhao, Wei Wang, Dacheng Zhang:
A High-Selectivity HNA Etching System for Bulk Micromachined Deep Holes with High Roundness. NEMS 2018: 397-400

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